Abstract
| - C60 has been shown to give increased sputter yields and,hence, secondary ions when used as a primary particlein SIMS analysis. In addition, for many samples, there isalso a reduction in damage accumulation following continued bombardment with the ion beam. In this paper,we report a study of the impact energy (up to 120 keV) ofC60 on the secondary ion yield from a number of sampleswith consideration of any variation in yield response overmass ranges up to m/z 2000. Although increased impactenergy is expected to produce a corresponding increasein sputter yield/rate, it is important to investigate anyincrease in sample damage with increasing energy and,hence, efficiency of the ion beams. On our test samplesincluding a metal, along with organic samples, there is ageneral increase in secondary ion yield of high-massspecies with increasing impact energy. A correspondingreduction in the formation of low-mass fragments is alsoobserved. Depth profiling of organic samples demonstrates that when using C60, there does not appear to beany increase in damage evident in the mass spectra asthe impact energy is increased.
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