| Abstract
| - A series of block polymers were synthesized from tetrahydropyranyl methacrylate(THPMA) and several fluorinated methacrylates. By changing both the length of thefluorinated side chain and the nature of its end group, the surface properties of these polymerswere greatly influenced. The polymers with perfluoroheptyl groups showed the lowest surfacetension, ∼7 mN/m, whereas those with perfluoropropyl groups showed surface tension around12 mN/m. The surface tension changed dramatically when the perfluorinated side chainwith a CF2H end group was capped, increasing to 18 mN/m for three −CF2− units. Therelative volume ratios of different block copolymers did not affect the resulting surface energy.After thermal decomposition of labile THP− groups in these polymers, acid and acidanhydride groups were produced. Thermal cross-linking of these groups increased mechanicalrobustness and led to better surface stability and adhesion of the polymer to the substrate.Because these polymers were designed for their lithographic abilities, some aspects of theirphotoimaging properties are discussed.
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