| Abstract
| - A novel zinc complex, Zn(tta)2·tmeda, has been synthesized in a single-step reaction and successfully applied to the deposition of high-quality ZnO films on (100) Si and quartz substrates.
- A novel diamine (N,N,N‘,N‘-tetramethyletilendiamine) adduct of zinc bis(2-thenoyl-trifluoroacetonate) has beensynthesized in a single-step reaction. Single-crystal X-ray diffraction studies of Zn(tta)2·tmeda provide evidence ofa mononuclear structure with a six-coordinated zinc ion. The thermal behavior of this adduct points to mass-transport properties suitable for its application to MOCVD processes. This novel compound has been successfullyapplied as a precursor for the deposition of ZnO films on (100) Si and quartz substrates. The good quality of thedeposited films indicates that the adduct is a very attractive precursor for MOCVD applications.
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