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http://hub.abes.fr/acs/periodical/jacsat/2005/volume_127/issue_21/101021ja043799d/authorship/1
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Department of Chemical Engineering.
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Bchir Omar J.
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Tungsten Allylimido Complexes Cl4(RCN)W(NC3H5) asSingle-Source CVD Precursors for WNxCy Thin Films.Correlation of Precursor Fragmentation to Film Properties
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