Gold nanoparticles were immobilized on silicon dioxide (SiO2) surfaces by embedding them in a layerof octadecylsiloxane (ODS) and also in SiO2 layers created by deposition and oxidation of ODS layers. TheODS and the SiO2 layers form selectively around the nanoparticles. Analysis of the particles after severaldeposition/oxidation cycles showed a decrease in measured height in accordance with the number of depositedlayers. Following one embedding cycle, the nanoparticles could not be moved with the tip of a scanningforce microscope operated in dynamic mode, whereas they moved in a controlled fashion prior to thedeposition of any layer. Depositing a second set of particles onto an ODS layer in contact with the substrateallowed us to construct a two-particle column by placing one particle directly on top of another one.