| Abstract
| - Studies from the authors' group of early-transition-metal silyl complexes and pathwaysin the reactions of silanes with transition-metal complexes are reviewed. Cyclopentadienyl-free, group 4 alkyl silyl, group 5 alkylidene silyl, group 6 alkylidyne silyl, and groups 4 and5 amide and imide silyl complexes have been prepared and characterized. In the reactionsof silanes with alkylidene and amide complexes, the MCH− π bonds and d−p π bonds inMNR2 were found to attack Si in silanes. The mechanistic studies here help inunderstanding the formation of mixtures of TiN and Si3N4 from the reactions of Ti(NMe2)4and SiH4 as microelectronic diffusion barrier materials.
- Studies from the authors' group of early-transition-metal silyl complexes and pathways in the reactions of silanes with transition-metal complexes are reviewed. New cyclopentadienyl-free d0 silyl complexes have been prepared and characterized, and mechanistic pathways in the reactions of silanes with alkylidene and amide complexes have been investigated.
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