Alkyl monolayers on silicon are prepared by scribing silicon while it is wet with 1-chloro-, 1-bromo-, and 1-iodoalkanes. The results suggest halogen radical abstraction from 1-haloalkanes and subsequent reaction of alkyl radicals with silicon. Functionalized (bromine-terminated) monolayers are prepared using Br(CH2)4Br. Scribing in the presence and absence of oxygen suggests that oxygen competes with alkyl halides for surface sites.