| Abstract
| - A high-yield method has been developed for the production of carboxyl-terminated alkylsiloxane monolayerson silicon using the ozonolysis and hydrolysis of 10-undecenyltrichlorosilane self-assembled monolayers(SAMs). Contact angles with water, a common measure of hydrophilicity and thus an effective measure ofcarboxyl termination, were brought to 0° on receding and approximately 16° on advancing, compared to 98°and 105° respectively before ozonation. Ellipsometry showed the presence of a full monolayer, 1 nm thickbefore ozonation, that decreases by about 0.2 nm during ozone treatment, largely due to the removal of acarbon atom in the process. This removed material coalesces as nanoparticles, observed with atomic forcemicroscopy (AFM) imaging. The process has a surprisingly narrow ozone dose window, with excess ozonationresulting in complete layer removal. The carboxylate moieties allow further chemical modification of thesurface in addition to the hydrophilic surface that can be produced by exposing the silicon dioxide substrate.
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